Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948790 | Heater support kit for bevel etch chamber | Tuan Nguyen, Jeongmin Lee, Anjana M. Patel | 2024-04-02 |
| 11894228 | Treatments for controlling deposition defects | Sudha Rathi, Ganesh Balasubramanian, Nagarajan Rajagopalan, Prashanthi Para, Hiral D. Tailor | 2024-02-06 |
| 11875969 | Process chamber with reduced plasma arc | Fei Wu, Sungwon Ha, Vinay Prabhakar, Ganesh Balasubramanian | 2024-01-16 |