Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100609 | Electrostatic chucking process | Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee | 2024-09-24 |
| 12027366 | Reduced hydrogen deposition processes | Xiaoquan Min, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee | 2024-07-02 |
| 12000048 | Pedestal for substrate processing chambers | Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Vinay Prabhakar, Kwangduk Douglas Lee, Sungwon Ha +1 more | 2024-06-04 |
| 11984305 | Substrate pedestal for improved substrate processing | Viren Kalsekar, Vinay Prabhakar | 2024-05-14 |
| 11862475 | Gas mixer to enable RPS purging | Fang Ruan, Diwakar Kedlaya, Amit Kumar BANSAL, Rajaram Narayanan, Badri Narayan Ramamurthi +3 more | 2024-01-02 |