Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136549 | Plasma-enhanced chemical vapor deposition of carbon hard-mask | Byung Seok KWON, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Bushra Afzal, Sungwon Ha +3 more | 2024-11-05 |
| 12062526 | Semiconductor processing chamber architecture for higher throughput and faster transition time | — | 2024-08-13 |
| 11984305 | Substrate pedestal for improved substrate processing | Vinay Prabhakar, Venkata Sharat Chandra Parimi | 2024-05-14 |