Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136549 | Plasma-enhanced chemical vapor deposition of carbon hard-mask | Byung Seok KWON, Kwangduk Douglas Lee, Bushra Afzal, Sungwon Ha, Vinay Prabhakar +3 more | 2024-11-05 |
| 12112949 | Highly etch selective amorphous carbon film | Rajesh Prasad, Sarah Michelle Bobek, Kwangduk Douglas Lee, Harry Whitesell, Hidetaka Oshio +4 more | 2024-10-08 |
| 12100609 | Electrostatic chucking process | Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Kwangduk Douglas Lee | 2024-09-24 |
| 12027366 | Reduced hydrogen deposition processes | Xiaoquan Min, Venkata Sharat Chandra Parimi, Kwangduk Douglas Lee | 2024-07-02 |
| 12014927 | Highly etch selective amorphous carbon film | Rajesh Prasad, Sarah Michelle Bobek, Kwangduk Douglas Lee, Harry Whitesell, Hidetaka Oshio +4 more | 2024-06-18 |
| 12000048 | Pedestal for substrate processing chambers | Sarah Michelle Bobek, Venkata Sharat Chandra Parimi, Vinay Prabhakar, Kwangduk Douglas Lee, Sungwon Ha +1 more | 2024-06-04 |