Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142475 | Sequential plasma and thermal treatment | Ning Li, Shuaidi Zhang, Mihaela Balseanu, Qi Gao, Tomohiko Kitajima +3 more | 2024-11-12 |
| 12112949 | Highly etch selective amorphous carbon film | Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Harry Whitesell, Hidetaka Oshio +4 more | 2024-10-08 |
| 12014927 | Highly etch selective amorphous carbon film | Sarah Michelle Bobek, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Harry Whitesell, Hidetaka Oshio +4 more | 2024-06-18 |