Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148597 | Multi-zone gas distribution systems and methods | Saravjeet Singh, Kenneth D. Schatz, Alan Tso, Marlin Wijekoon | 2024-11-19 |
| 12131913 | Methods, systems, and apparatus for processing substrates using one or more amorphous carbon hardmask layers | Krishna Nittala, Sarah Michelle Bobek, Kwangduk Douglas Lee, Ratsamee Limdulpaiboon, Karthik Janakiraman | 2024-10-29 |