Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148597 | Multi-zone gas distribution systems and methods | Kenneth D. Schatz, Alan Tso, Marlin Wijekoon, Dimitri Kioussis | 2024-11-19 |
| 12131952 | Wafer dicing using femtosecond-based laser and plasma etch | Wei-Sheng Lei, Brad Eaton, Madhava Rao Yalamanchili, Ajay Kumar, James M. Holden | 2024-10-29 |
| 11915911 | Two piece electrode assembly with gap for plasma control | Tien Fak Tan, Dmitry Lubomirsky, Tae Wan Kim, Kenneth D. Schatz, Tae Seung Cho +1 more | 2024-02-27 |