Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12009228 | Low temperature chuck for plasma processing systems | Toan Q. Tran, Zilu Weng, Dmitry Lubomirsky, Satoru Kobayashi, Soonam Park +2 more | 2024-06-11 |
| 12002659 | Apparatus for generating etchants for remote plasma processes | David Benjaminson, Kenneth D. Schatz, Ryan Pakulski, Martin Yue Choy, Pratheep Gunaseelan +1 more | 2024-06-04 |
| 11915911 | Two piece electrode assembly with gap for plasma control | Tien Fak Tan, Saravjeet Singh, Dmitry Lubomirsky, Tae Wan Kim, Kenneth D. Schatz +1 more | 2024-02-27 |
| 11901161 | Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processes | Saravana Kumar Natarajan, Kenneth D. Schatz, Dmitry Lubomirsky, Samartha Subramanya | 2024-02-13 |