Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002659 | Apparatus for generating etchants for remote plasma processes | Tae Seung Cho, David Benjaminson, Kenneth D. Schatz, Ryan Pakulski, Martin Yue Choy +1 more | 2024-06-04 |