Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002659 | Apparatus for generating etchants for remote plasma processes | Tae Seung Cho, David Benjaminson, Kenneth D. Schatz, Ryan Pakulski, Pratheep Gunaseelan +1 more | 2024-06-04 |
| 11915950 | Multi-zone semiconductor substrate supports | Mehmet Tugrul Samir, Dongqing Yang, Dmitry Lubomirsky, Peter M. Hillman, Soonam Park +1 more | 2024-02-27 |