Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11915950 | Multi-zone semiconductor substrate supports | Mehmet Tugrul Samir, Dmitry Lubomirsky, Peter M. Hillman, Soonam Park, Martin Yue Choy +1 more | 2024-02-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11915950 | Multi-zone semiconductor substrate supports | Mehmet Tugrul Samir, Dmitry Lubomirsky, Peter M. Hillman, Soonam Park, Martin Yue Choy +1 more | 2024-02-27 |