Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11901161 | Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processes | Tae Seung Cho, Kenneth D. Schatz, Dmitry Lubomirsky, Samartha Subramanya | 2024-02-13 |