Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12020911 | Chucking process and system for substrate processing chambers | Bhaskar Kumar, Ganesh Balasubramanian, Vivek Shah | 2024-06-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12020911 | Chucking process and system for substrate processing chambers | Bhaskar Kumar, Ganesh Balasubramanian, Vivek Shah | 2024-06-25 |