Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12112890 | Top magnets for decreased non-uniformity in PVD | Borui Xia, Anthony Chih-Tung Chan, Shiyu YUE, Wei-Sheng Lei, Mukund Sundararajan +2 more | 2024-10-08 |
| 11939666 | Methods and apparatus for precleaning and treating wafer surfaces | Xiangjin Xie, Carmen Leal Cervantes, Feng Chen, Lu Chen, Wenjing Xu +4 more | 2024-03-26 |