Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12014906 | High temperature detachable very high frequency (VHF) electrostatic chuck (ESC) for PVD chamber | Keith A. Miller, Cheng-Hsiung Tsai, John C. Forster, Mukund Sundararajan | 2024-06-18 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12014906 | High temperature detachable very high frequency (VHF) electrostatic chuck (ESC) for PVD chamber | Keith A. Miller, Cheng-Hsiung Tsai, John C. Forster, Mukund Sundararajan | 2024-06-18 |