Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136544 | Etch uniformity improvement for single turn internal coil PVD chamber | Anthony Chih-Tung Chan, Adolph Miller Allen, Mehul Chauhan | 2024-11-05 |
| 12027352 | Apparatus for generating magnetic fields on substrates during semiconductor processing | Suhas Bangalore Umesh, Kishor Kalathiparambil | 2024-07-02 |