Issued Patents 2024
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094699 | Methods and apparatus for controlling ion fraction in physical vapor deposition processes | Xiaodong Wang, Joung Joo Lee, Fuhong Zhang, Keith A. Miller, William Fruchterman +4 more | 2024-09-17 |
| D1038901 | Collimator for a physical vapor deposition chamber | Fuhong Zhang, Suhas Bangalore Umesh, Madan Kumar Shimoga Mylarappa | 2024-08-13 |
| 11990319 | Methods and apparatus for processing a substrate | Yida LIN, Rui Li, Haitao Wang, Noufal Kappachali, Xiangjin Xie | 2024-05-21 |
| D1026839 | Collimator for a physical vapor deposition (PVD) chamber | Luke Vianney Varkey, Xiangjin Xie | 2024-05-14 |
| D1026054 | Collimator for a physical vapor deposition (PVD) chamber | Keith A. Miller, Luke Vianney Varkey, Xiangjin Xie, Kishor Kalathiparambil | 2024-05-07 |
| D1025935 | Collimator for a physical vapor deposition (PVD) chamber | Luke Vianney Varkey, Xiangjin Xie | 2024-05-07 |
| D1025936 | Collimator for a physical vapor deposition (PVD) chamber | Luke Vianney Varkey, Xiangjin Xie | 2024-05-07 |
| D1024149 | Collimator for a physical vapor deposition (PVD) chamber | Luke Vianney Varkey, Xiangjin Xie | 2024-04-23 |
| 11915915 | Apparatus for generating magnetic fields during semiconductor processing | Suhas Bangalore Umesh | 2024-02-27 |
| D1009816 | Collimator for a physical vapor deposition chamber | Keith A. Miller, Fuhong Zhang, Luke Vianney Varkey, Kishor Kalathiparambil, Xiangjin Xie | 2024-01-02 |