Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12123089 | Method and apparatus for forming a plasma resistant coating, component, and plasma processing apparatus | Jiao DUAN, Xiang Sun, Xingjian CHEN | 2024-10-22 |
| 11932950 | Organic contamination free surface machining | Yuanhong Guo, Marek Radko, Steven V. Sansoni, Nagendra Madiwal, Matvey Farber +7 more | 2024-03-19 |