Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12123089 | Method and apparatus for forming a plasma resistant coating, component, and plasma processing apparatus | Sheng Guo, Xiang Sun, Xingjian CHEN | 2024-10-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12123089 | Method and apparatus for forming a plasma resistant coating, component, and plasma processing apparatus | Sheng Guo, Xiang Sun, Xingjian CHEN | 2024-10-22 |