Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094716 | Chambers and coatings for reducing backside damage | Leonard Tedeschi, Kartik Ramaswamy, Benjamin Schwarz, Changgong Wang, Vahid Firouzdor +1 more | 2024-09-17 |
| 12033881 | Reduced localized force in electrostatic chucking | Vladimir Knyazik, Stephen Prouty | 2024-07-09 |