Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12162115 | Chamber components with polished internal apertures | Jennifer Y. Sun, David Koonce, Biraja P. Kanungo | 2024-12-10 |
| 12094716 | Chambers and coatings for reducing backside damage | Leonard Tedeschi, Kartik Ramaswamy, Benjamin Schwarz, Changgong Wang, Sumanth Banda +1 more | 2024-09-17 |
| 11920234 | Yttrium oxide based coating composition | Christopher Laurent Beaudry, Hyun-Ho Doh, Joseph Behnke, Joseph F. Sommers | 2024-03-05 |