Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12162115 | Chamber components with polished internal apertures | Vahid Firouzdor, David Koonce, Biraja P. Kanungo | 2024-12-10 |
| 12104246 | Atomic layer deposition of protective coatings for semiconductor process chamber components | David Fenwick | 2024-10-01 |
| 12098107 | Methods of making nanopowders, nanoceramic materials and nanoceramic components | Guodong Zhan, Xiaowei Wu, Xiao-Ming He | 2024-09-24 |
| 12049696 | Plasma resistant process chamber lid | Xiaowei Wu, Michael R. Rice | 2024-07-30 |
| 12004337 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Gayatri Natu, Geetika Bajaj, Prerna Goradia, Darshan Thakare, David Fenwick +6 more | 2024-06-04 |
| 12002657 | Multi-layer plasma resistant coating by atomic layer deposition | Xiaowei Wu, David Fenwick, Guodong Zhan | 2024-06-04 |
| 11984302 | Magnetic-material shield around plasma chambers near pedestal | Job George Konnoth Joseph, Sathya Swaroop Ganta, Kallol Bera, Andrew Nguyen, Jay D. Pinson, II +6 more | 2024-05-14 |