Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12004337 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Gayatri Natu, Prerna Goradia, Darshan Thakare, David Fenwick, Xiaoming He +6 more | 2024-06-04 |
| 11976357 | Methods for forming a protective coating on processing chamber surfaces or components | Yogita Pareek, Prerna Goradia, Ankur Kadam | 2024-05-07 |