Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12104246 | Atomic layer deposition of protective coatings for semiconductor process chamber components | Jennifer Y. Sun | 2024-10-01 |
| 12002657 | Multi-layer plasma resistant coating by atomic layer deposition | Xiaowei Wu, Jennifer Y. Sun, Guodong Zhan | 2024-06-04 |
| 12004337 | Ultrathin conformal coatings for electrostatic dissipation in semiconductor process tools | Gayatri Natu, Geetika Bajaj, Prerna Goradia, Darshan Thakare, Xiaoming He +6 more | 2024-06-04 |