| 12163911 |
Capacitive sensor housing for chamber condition monitoring |
Yaoling Pan, Leonard Tedeschi, Michael D. Willwerth, Daniel T. McCormick |
2024-12-10 |
| 12123090 |
Differential capacitive sensor for in-situ film thickness and dielectric constant measurement |
Yaoling Pan, Leonard Tedeschi |
2024-10-22 |
| 12114083 |
Smart camera substrate |
Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Blake Erickson, Devendra Channappa Holeyannavar +4 more |
2024-10-08 |
| 12031910 |
Transmission corrected plasma emission using in-situ optical reflectometry |
Zhaozhao Zhu, Blake Erickson, Chunlei Zhang |
2024-07-09 |
| 12009236 |
Sensors and system for in-situ edge ring erosion monitor |
Yaoling Pan, Michael D. Willwerth, Leonard Tedeschi, Daniel Sang Byun, Philip Allan Kraus +5 more |
2024-06-11 |
| 12009191 |
Thin film, in-situ measurement through transparent crystal and transparent substrate within processing chamber wall |
Blake Erickson, Zhaozhao Zhu, Michael D. Willwerth, Barry Craver |
2024-06-11 |
| 12000041 |
Processing chamber condition and process state monitoring using optical reflector attached to processing chamber liner |
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2024-06-04 |
