Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12159802 | Shortened load port for factory interface | Srinivas Poshatrahalli Gopalakrishna, Paul B. Reuter, Douglas B. Baumgarten, Sushant S. Koshti, Arunkumar Ramachandraiah +1 more | 2024-12-03 |
| 12142500 | Side storage pods, equipment front end modules, and methods for processing substrates | Sandesh Doddamane Ramappa, Dean C. Hruzek, Michael R. Rice, Jeffrey A. Brodine | 2024-11-12 |
| 12142508 | Factory interface robots usable with integrated load locks | Sushant S. Koshti, Paul B. Reuter, David Phillips, Jacob Newman, Andrew J. Constant +6 more | 2024-11-12 |
| 12114083 | Smart camera substrate | Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Blake Erickson, Patrick Tae +4 more | 2024-10-08 |