Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142500 | Side storage pods, equipment front end modules, and methods for processing substrates | Devendra Channappa Holeyannavar, Dean C. Hruzek, Michael R. Rice, Jeffrey A. Brodine | 2024-11-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12142500 | Side storage pods, equipment front end modules, and methods for processing substrates | Devendra Channappa Holeyannavar, Dean C. Hruzek, Michael R. Rice, Jeffrey A. Brodine | 2024-11-12 |