Issued Patents 2024
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12159796 | Systems and methods for integrating load locks into a factory interface footprint space | Jacob Newman, Andrew J. Constant, Michael R. Rice, Shay Assaf, Sushant S. Koshti | 2024-12-03 |
| 12159802 | Shortened load port for factory interface | Srinivas Poshatrahalli Gopalakrishna, Devendra Channappa Holeyannavar, Douglas B. Baumgarten, Sushant S. Koshti, Arunkumar Ramachandraiah +1 more | 2024-12-03 |
| 12140339 | Filter isolation for equipment front end module | James Christopher Hansen, Steven Trey Tindel | 2024-11-12 |
| 12142508 | Factory interface robots usable with integrated load locks | Sushant S. Koshti, David Phillips, Jacob Newman, Andrew J. Constant, Michael R. Rice +6 more | 2024-11-12 |
| 12094715 | Abatement and strip process chamber in a load lock configuration | Martin Jeffrey Salinas, Andrew Nguyen, Jared Ahmad Lee | 2024-09-17 |
| 12076854 | Increased number of load ports on factory interface with robot that moves on track | Sushant S. Koshti, Maureen Frances Breiling | 2024-09-03 |
| 12074045 | Prevention of contamination of substrates during gas purging | Douglas B. Baumgarten, Russell Kaplan, Amitabh Puri | 2024-08-27 |
| 11993978 | Seal mechanism for load port doors | James Christopher Hansen, Douglas B. Baumgarten | 2024-05-28 |