Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12114083 | Smart camera substrate | Upendra Ummethala, Philip Allan Kraus, Keith R. Berding, Patrick Tae, Devendra Channappa Holeyannavar +4 more | 2024-10-08 |
| 12080574 | Low open area and coupon endpoint detection | Varoujan Chakarian | 2024-09-03 |
| 12031910 | Transmission corrected plasma emission using in-situ optical reflectometry | Patrick Tae, Zhaozhao Zhu, Chunlei Zhang | 2024-07-09 |
| 12009191 | Thin film, in-situ measurement through transparent crystal and transparent substrate within processing chamber wall | Patrick Tae, Zhaozhao Zhu, Michael D. Willwerth, Barry Craver | 2024-06-11 |
| 11927543 | Multiple reflectometry for measuring etch parameters | Keith R. Berding, Michael Kutney, Soumendra N. Barman, Zhaozhao Zhu, Michelle SanPedro +1 more | 2024-03-12 |