Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12078547 | Etalon thermometry for plasma environments | Bruce E. Adams, Samuel C. Howells, Alvaro Garcia, Tony Jefferson GNANAPRAKASA, Lei Lian | 2024-09-03 |
| 12009191 | Thin film, in-situ measurement through transparent crystal and transparent substrate within processing chamber wall | Patrick Tae, Blake Erickson, Zhaozhao Zhu, Michael D. Willwerth | 2024-06-11 |
| 11901203 | Substrate process endpoint detection using machine learning | Pengyu Han, Lei Lian, Shu-Yu Chen, Todd Egan, Wan Hsueh Lai +3 more | 2024-02-13 |