Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11901203 | Substrate process endpoint detection using machine learning | Pengyu Han, Lei Lian, Shu-Yu Chen, Todd Egan, Chao-Hsien Lee +3 more | 2024-02-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11901203 | Substrate process endpoint detection using machine learning | Pengyu Han, Lei Lian, Shu-Yu Chen, Todd Egan, Chao-Hsien Lee +3 more | 2024-02-13 |