Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12106984 | Accelerating preventative maintenance recovery and recipe optimizing using machine-learning based algorithm | — | 2024-10-01 |
| 12066639 | Adjustable achromatic collimator assembly for endpoint detection systems | John Anthony O'MALLEY, III, Michael N. Grimbergen, Lei Lian, Upendra Ummethala, Michael Kutney | 2024-08-20 |
| 11965798 | Endpoint detection system for enhanced spectral data collection | Lei Lian | 2024-04-23 |
| 11901203 | Substrate process endpoint detection using machine learning | Lei Lian, Shu-Yu Chen, Todd Egan, Wan Hsueh Lai, Chao-Hsien Lee +3 more | 2024-02-13 |