Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12066639 | Adjustable achromatic collimator assembly for endpoint detection systems | Pengyu Han, John Anthony O'MALLEY, III, Lei Lian, Upendra Ummethala, Michael Kutney | 2024-08-20 |
| 12007686 | Etch processing system having reflective endpoint detection | Khiem K. Nguyen | 2024-06-11 |