Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148647 | Integrated substrate measurement system | Patricia A. Schulze, Gregory John Freeman, Arunkumar Ramachandraiah, Chih Chung Chou, Zhaozhao Zhu +1 more | 2024-11-19 |
| 12066639 | Adjustable achromatic collimator assembly for endpoint detection systems | Pengyu Han, John Anthony O'MALLEY, III, Michael N. Grimbergen, Lei Lian, Upendra Ummethala | 2024-08-20 |
| 11927543 | Multiple reflectometry for measuring etch parameters | Blake Erickson, Keith R. Berding, Soumendra N. Barman, Zhaozhao Zhu, Michelle SanPedro +1 more | 2024-03-12 |