Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12078547 | Etalon thermometry for plasma environments | Bruce E. Adams, Samuel C. Howells, Alvaro Garcia, Barry Craver, Tony Jefferson GNANAPRAKASA | 2024-09-03 |
| 12066639 | Adjustable achromatic collimator assembly for endpoint detection systems | Pengyu Han, John Anthony O'MALLEY, III, Michael N. Grimbergen, Upendra Ummethala, Michael Kutney | 2024-08-20 |
| 12046522 | Endpoint detection in low open area and/or high aspect ratio etch applications | Quentin Ernie Walker, Zefang WANG, Shinichi Koseki | 2024-07-23 |
| 11965798 | Endpoint detection system for enhanced spectral data collection | Pengyu Han | 2024-04-23 |
| 11901203 | Substrate process endpoint detection using machine learning | Pengyu Han, Shu-Yu Chen, Todd Egan, Wan Hsueh Lai, Chao-Hsien Lee +3 more | 2024-02-13 |