Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12046522 | Endpoint detection in low open area and/or high aspect ratio etch applications | Lei Lian, Quentin Ernie Walker, Zefang WANG | 2024-07-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12046522 | Endpoint detection in low open area and/or high aspect ratio etch applications | Lei Lian, Quentin Ernie Walker, Zefang WANG | 2024-07-23 |