Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12046522 | Endpoint detection in low open area and/or high aspect ratio etch applications | Lei Lian, Zefang WANG, Shinichi Koseki | 2024-07-23 |
| 11874234 | Multi-level RF pulse monitoring and RF pulsing parameter optimization at a manufacturing system | Dermot Cantwell, Serghei Malkov, Jatinder Kumar | 2024-01-16 |