Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1049067 | Ring for an anti-rotation process kit for a substrate processing chamber | Rohan Rane, Xue Yang Chang, Timothy Joseph Franklin | 2024-10-29 |
| 12009236 | Sensors and system for in-situ edge ring erosion monitor | Yaoling Pan, Patrick Tae, Michael D. Willwerth, Leonard Tedeschi, Philip Allan Kraus +5 more | 2024-06-11 |
| 11894255 | Sheath and temperature control of process kit | Jaeyong Cho, Kartik Ramaswamy | 2024-02-06 |