Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948826 | High power electrostatic chuck design with radio frequency coupling | Vijay D. Parkhe, Haitao Wang, Kartik Ramaswamy, Chunlei Zhang | 2024-04-02 |
| 11894255 | Sheath and temperature control of process kit | Kartik Ramaswamy, Daniel Sang Byun | 2024-02-06 |