Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1049067 | Ring for an anti-rotation process kit for a substrate processing chamber | Xue Yang Chang, Timothy Joseph Franklin, Daniel Sang Byun | 2024-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1049067 | Ring for an anti-rotation process kit for a substrate processing chamber | Xue Yang Chang, Timothy Joseph Franklin, Daniel Sang Byun | 2024-10-29 |