Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12163911 | Capacitive sensor housing for chamber condition monitoring | Patrick Tae, Leonard Tedeschi, Michael D. Willwerth, Daniel T. McCormick | 2024-12-10 |
| 12123090 | Differential capacitive sensor for in-situ film thickness and dielectric constant measurement | Patrick Tae, Leonard Tedeschi | 2024-10-22 |
| 12006209 | MEMS and NEMS structures | John H. Hong, Tallis Young Chang, Edward Chan, Bing Wen, Sean ANDREWS | 2024-06-11 |
| 12009236 | Sensors and system for in-situ edge ring erosion monitor | Patrick Tae, Michael D. Willwerth, Leonard Tedeschi, Daniel Sang Byun, Philip Allan Kraus +5 more | 2024-06-11 |
| 11959868 | Capacitive sensor for monitoring gas concentration | Xiaopu Li, Kallol Bera, Kelvin Chan, Amir Bayati, Philip Allan Kraus +2 more | 2024-04-16 |