Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170186 | Showerhead assembly with heated showerhead | Anantha K. Subramani, Seyyed A. Fazeli, Yang Guo, Chandrashekara Baginagere, Ramcharan Sundar +1 more | 2024-12-17 |
| 12131887 | Plasma processing system and method using radio frequency and microwave power | Yanxiang Shi, Mingmei Wang | 2024-10-29 |
| 11887815 | Plasma processing system and method using radio frequency (RF) and microwave power | Yanxiang Shi, Mingmei Wang | 2024-01-30 |