Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131887 | Plasma processing system and method using radio frequency and microwave power | Yunho Kim, Mingmei Wang | 2024-10-29 |
| 11887815 | Plasma processing system and method using radio frequency (RF) and microwave power | Yunho Kim, Mingmei Wang | 2024-01-30 |