Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131887 | Plasma processing system and method using radio frequency and microwave power | Yunho Kim, Yanxiang Shi | 2024-10-29 |
| 12131914 | Selective etching with fluorine, oxygen and noble gas containing plasmas | Du Zhang, Hojin Kim, Shigeru Tahara, Kaoru Maekawa, Jacques Faguet +4 more | 2024-10-29 |
| 11887815 | Plasma processing system and method using radio frequency (RF) and microwave power | Yunho Kim, Yanxiang Shi | 2024-01-30 |