Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136536 | Electrostatic chuck with multiple radio frequency meshes to control plasma uniformity | Edward P. Hammond, IV | 2024-11-05 |
| 11908662 | Device and method for tuning plasma distribution using phase control | Xiaopu Li, Kallol Bera, Edward P. Hammond, IV, Amit Kumar BANSAL, Jun Ma +1 more | 2024-02-20 |