Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12136536 | Electrostatic chuck with multiple radio frequency meshes to control plasma uniformity | Jonghoon Baek | 2024-11-05 |
| 12136549 | Plasma-enhanced chemical vapor deposition of carbon hard-mask | Byung Seok KWON, Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Bushra Afzal, Sungwon Ha +3 more | 2024-11-05 |
| 12094748 | Bipolar esc with balanced RF impedance | Jian Li, Juan Carlos Rocha-Alvarez, Dmitry A. Dzilno, Wenhao Zhang | 2024-09-17 |
| 11908662 | Device and method for tuning plasma distribution using phase control | Xiaopu Li, Kallol Bera, Jonghoon Baek, Amit Kumar BANSAL, Jun Ma +1 more | 2024-02-20 |