Issued Patents 2024
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176188 | Optical spectrum sensor wafer or robot for chamber condition monitoring | Wenwei Qiao | 2024-12-24 |
| 12066285 | Hoist and winch cable angle sensor | — | 2024-08-20 |
| 12062529 | Microwave resonator array for plasma diagnostics | David Peterson | 2024-08-13 |
| 12009235 | In-chamber low-profile sensor assembly | Wenwei Qiao | 2024-06-11 |
| 11920994 | Surface acoustic wave sensor assembly | — | 2024-03-05 |
| 11901875 | Surface acoustic wave sensor assembly | — | 2024-02-13 |
| 11874189 | MEMS resonator sensor substrate for plasma, temperature, stress, or deposition sensing | David Peterson, Philip Allan Kraus, Amir Bayati | 2024-01-16 |