Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176188 | Optical spectrum sensor wafer or robot for chamber condition monitoring | Chuang-Chia Lin | 2024-12-24 |
| 12009235 | In-chamber low-profile sensor assembly | Chuang-Chia Lin | 2024-06-11 |