Issued Patents 2023
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11850703 | Method of forming retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more | 2023-12-26 |
| 11850700 | Sequential application of cleaning fluids for improved maintenance of chemical mechanical polishing systems | Jamie Stuart Leighton, Roger M. Johnson, Van H. Nguyen | 2023-12-26 |
| 11780046 | Polishing system with annular platen or polishing pad | Paul D. Butterfield, Thomas H. Osterheld, Shou-Sung Chang, Steven M. Zuniga, Fred C. Redeker | 2023-10-10 |
| 11768984 | Parameter sensing and computer modeling for gas delivery health monitoring | Ala Moradian, James L'HEUREUX, Shuran Sheng, Rohit Mahakali, Karthik Ramanathan +4 more | 2023-09-26 |
| 11764069 | Asymmetry correction via variable relative velocity of a wafer | Jimin Zhang, Brian J. Brown, Eric Lau, Ekaterina A. Mikhaylichenko, Gerald Alonzo | 2023-09-19 |
| 11717936 | Methods for a web-based CMP system | Dmitry Sklyar, Gerald Alonzo, Jonathan P. Domin, Steven M. Zuniga, Jay Gurusamy | 2023-08-08 |
| 11701749 | Monitoring of vibrations during chemical mechanical polishing | Boguslaw A. Swedek, Dominic J. Benvegnu, Chih Chung Chou, Nicholas A. Wiswell, Thomas H. Osterheld | 2023-07-18 |
| 11682561 | Retaining ring having inner surfaces with facets | Steven M. Zuniga, Andrew J. Nagengast, Samuel Chu-Chiang Hsu, Gautam Shashank Dandavate | 2023-06-20 |
| 11673226 | Retaining ring for CMP | Andrew J. Nagengast, Christopher Heung-Gyun Lee, Thomas Li, Anand N. Iyer, Jie Diao +3 more | 2023-06-13 |
| 11621152 | Methods and apparatus for processing a substrate using improved shield configurations | Soundarrajan JEMBULINGAM, Jian J. Chen | 2023-04-04 |
| 11597052 | Temperature control of chemical mechanical polishing | Hari Soundararajan, Shou-Sung Chang, Haosheng Wu, Jianshe Tang, Rajeev Bajaj +1 more | 2023-03-07 |
| 11577361 | Retaining ring with shaped surface and method of forming | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more | 2023-02-14 |