Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11621152 | Methods and apparatus for processing a substrate using improved shield configurations | Soundarrajan JEMBULINGAM, Jeonghoon Oh | 2023-04-04 |
| 11613812 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2023-03-28 |